Permanent Gases Pre-concentrator for PPT-level Analysis with the Epd Technology

Tuesday, March 09, 2021: 10:05 AM - 10:25 AM

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Description

Constant monitoring of gases used in the fabrication of semiconductors is essential, as even low ppb-level of impurities can cause irreversible damages to the materials. Permanent gases (H2, O2, N2, CH4, CO and CO2) are among the most common impurities found in UHP gases, as they are the most abundant molecules in air, but they can be difficult to measure due to their high excitation energy. In the last decades, highly sensitive detectors relying on helium, such as the DID, PDID, HID, etc. have been developed, thanks to its high ionization energy. However, due to the increasing demand and low supplies, the price of helium skyrocketed and its access is becoming more and more limited. More recently, ASDevices developed the Enhanced Plasma Discharge (Epd) technology, which can also use low-cost argon or nitrogen as the carrier/discharge gas. This technology allows measurement of permanent gases down to the low ppb level. In order to further improve the LODs, ASDevices developed a pre-concentration system and methodology that use our new Trap & Release Purge Lip Sealing Valve. This system uses unique mixtures of synthetic materials optimised for concentrating the analytes while eliminating the matrix. Thanks to matrix elimination with this system, the chromatography can even be simplified. LODs in the ppt were reached for all the permanent gases in various matrices, using argon as the carrier/discharge gas. This presentation intends to show how the combination of ASDevices products, with their unique features, can be used to improve detection limits for permanent gases in specialty industrial gases, while reducing the operation costs.

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Additional Info

Keywords: Please select up to 4 keywords ONLY:
Chromatography - Other,Instrumentation,Specialty Gas Analysis,Trace Analysis