Welcome to the next wave of abatement technology. Introducing the Marathon™ M91A, the newest addition to our product line. It is the most efficient and reliable abatement solution for treating any process gases used in solar cell manufacturing, especially harsh gases used in PECVD & CVD processes. The M91A is the first of its kind microwave plasma and wet integrated system, which has a chemical destruction removal efficiency of >99% on all process gas types.
Unlike traditional combustion/wet systems, the M91A uses Plasmafication Technology to individually target each molecule. This is what sets it apart, the fact no fuel gas is required to tackle highly structurally bonded molecules. Typical combustion units generate high volumes of CO₂ and NOx emissions as a by-product post abatement, because of the requirement for a fuel source. Using the Marathon M91A dramatically reduces these post abatement emissions by around 75%.
Additional Options
Pre-wet modules are required for high SiH4 flows used in PV fabrication. The addition of the pre-wet module will take PM cycles from weeks to months (process dependant).
For further particulate management, we also offer a filter skid option post abatement, which is proven to increase uptime further.
Advantages:
- Low energy consumption microwave plasma
- Proprietary waveguide design
- Stable plasma
- No electrical heaters and no fuel gas!
- Large CO₂ & NOx reduction
- Additional options for greater uptime
For additional information, please contact sales@ecosysabatement.com.